Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022377 | Method and apparatus for excimer curing | Muhammad M. Rasheed, Ellie Yieh | 2011-09-20 |
| 7989365 | Remote plasma source seasoning | Soonam Park, Soo Hyun Jeon, Toan Q. Tran, Jang-Gyoo Yang, Qiwei Liang | 2011-08-02 |
| 7972968 | High density plasma gapfill deposition-etch-deposition process etchant | Young S. Lee, Ying Rui, Daniel J. Hoffman, Jang-Gyoo Yang, Anchuan Wang | 2011-07-05 |
| 7964040 | Multi-port pumping system for substrate processing chambers | Muhammad M. Rasheed, James Santosa | 2011-06-21 |