Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972968 | High density plasma gapfill deposition-etch-deposition process etchant | Young S. Lee, Ying Rui, Dmitry Lubomirsky, Daniel J. Hoffman, Jang-Gyoo Yang | 2011-07-05 |
| 7910491 | Gapfill improvement with low etch rate dielectric liners | Young Soo Kwon, Bi Jang, Young S. Lee, Mihaela Balseanu, Li-Qun Xia +1 more | 2011-03-22 |
| 7867921 | Reduction of etch-rate drift in HDP processes | Young S. Lee, Manoj Vellaikal, Jason Bloking, Jin-Ho Jeon, Hemant P. Mungekar | 2011-01-11 |