Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964473 | Method of filling an opening in the manufacturing of a semiconductor device | Yong-Kyu Kim, Kyoung Soo Kwon | 2011-06-21 |
| 7910491 | Gapfill improvement with low etch rate dielectric liners | Young Soo Kwon, Bi Jang, Anchuan Wang, Young S. Lee, Mihaela Balseanu +1 more | 2011-03-22 |
| 7867921 | Reduction of etch-rate drift in HDP processes | Anchuan Wang, Young S. Lee, Manoj Vellaikal, Jason Bloking, Hemant P. Mungekar | 2011-01-11 |