Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Kartik Santhanam, Yen B. Ta, Martin A. Hilkene, Matthew D. Scotney-Castle, Canfeng Lai +2 more | 2011-08-23 |
| 7867921 | Reduction of etch-rate drift in HDP processes | Anchuan Wang, Young S. Lee, Jason Bloking, Jin-Ho Jeon, Hemant P. Mungekar | 2011-01-11 |