Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Matthew D. Scotney-Castle, Canfeng Lai +2 more | 2011-08-23 |
| 7989329 | Removal of surface dopants from a substrate | Kartik Ramaswamy, Kenneth S. Collins, Biagio Gallo, Hiroji Hanawa, Majeed A. Foad +2 more | 2011-08-02 |
| 7968401 | Reducing photoresist layer degradation in plasma immersion ion implantation | Kartik Santhanam, Yen B. Ta, Peter I. Porshnev, Majeed A. Foad | 2011-06-28 |
| 7872247 | Ion beam guide tube | Geoffrey Ryding, Gregory Robert Alcott, Lee Spraggon, Robert J. Mitchell, Matthew Castle +1 more | 2011-01-18 |