Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Martin A. Hilkene, Matthew D. Scotney-Castle, Canfeng Lai +2 more | 2011-08-23 |
| 7968401 | Reducing photoresist layer degradation in plasma immersion ion implantation | Martin A. Hilkene, Kartik Santhanam, Peter I. Porshnev, Majeed A. Foad | 2011-06-28 |