Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867921 | Reduction of etch-rate drift in HDP processes | Anchuan Wang, Young S. Lee, Manoj Vellaikal, Jason Bloking, Jin-Ho Jeon | 2011-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867921 | Reduction of etch-rate drift in HDP processes | Anchuan Wang, Young S. Lee, Manoj Vellaikal, Jason Bloking, Jin-Ho Jeon | 2011-01-11 |