Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994872 | Apparatus for multiple frequency power application | Steven C. Shannon, Matthew L. Miller, Kartik Ramaswamy, James P. Cruse | 2011-08-09 |
| 7989365 | Remote plasma source seasoning | Soonam Park, Soo Hyun Jeon, Toan Q. Tran, Qiwei Liang, Dmitry Lubomirsky | 2011-08-02 |
| 7972968 | High density plasma gapfill deposition-etch-deposition process etchant | Young S. Lee, Ying Rui, Dmitry Lubomirsky, Daniel J. Hoffman, Anchuan Wang | 2011-07-05 |
| 7955986 | Capacitively coupled plasma reactor with magnetic plasma control | Daniel J. Hoffman, Matthew L. Miller, Heeyeop Chae, Michael Barnes, Tetsuya Ishikawa +1 more | 2011-06-07 |