Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955986 | Capacitively coupled plasma reactor with magnetic plasma control | Daniel J. Hoffman, Matthew L. Miller, Jang-Gyoo Yang, Heeyeop Chae, Tetsuya Ishikawa +1 more | 2011-06-07 |
| 7915139 | CVD flowable gap fill | Chi-I Lang, Judy H. Huang, Sunil Shanker | 2011-03-29 |
| 7901539 | Apparatus and methods for transporting and processing substrates | Terry Bluck, Kevin Fairbairn, Christopher T. Lane | 2011-03-08 |
| 7888233 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Chi-I Lang, Judy H. Huang, Sunil Shanker | 2011-02-15 |
| 7861990 | Combination awning bracket and light support system | — | 2011-01-04 |