Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062977 | Ternary tungsten-containing resistive thin films | Kaihan Ashtiani, Girish Dixit, Anna Battaglia, Stefano Rassiga | 2011-11-22 |
| 8058170 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Mirko Glass, Michael Danek, Kaihan Ashtiani, Feng Chen +2 more | 2011-11-15 |
| 8053365 | Methods for forming all tungsten contacts and lines | Kaihan Ashtiani, Karl B. Levy | 2011-11-08 |
| 7972976 | VLSI fabrication processes for introducing pores into dielectric materials | Willibrordus Gerardus Maria van den Hoek, Nerissa Draeger, Richard S. Hill, Jianing Sun, Gary W. Ray | 2011-07-05 |
| 7888233 | Flowable film dielectric gap fill process | Vishal Gauri, Chi-I Lang, Judy H. Huang, Michael Barnes, Sunil Shanker | 2011-02-15 |