Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968452 | Titanium-based high-K dielectric films | Hanhong Chen, Pragati Kumar, Edward Haywood, Sandra G. Malhotra, Imran Hashim +3 more | 2011-06-28 |
| 7951683 | In-situ process layer using silicon-rich-oxide for etch selectivity in high AR gapfill | — | 2011-05-31 |
| 7927947 | Methods for depositing high-K dielectrics | Xiangxin Rui, Sandra G. Malhotra, Imran Hashim, Edward Haywood | 2011-04-19 |
| 7915139 | CVD flowable gap fill | Chi-I Lang, Judy H. Huang, Michael Barnes | 2011-03-29 |
| 7888233 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Chi-I Lang, Judy H. Huang, Michael Barnes | 2011-02-15 |