Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915139 | CVD flowable gap fill | Chi-I Lang, Michael Barnes, Sunil Shanker | 2011-03-29 |
| 7888233 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Chi-I Lang, Michael Barnes, Sunil Shanker | 2011-02-15 |