Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062977 | Ternary tungsten-containing resistive thin films | Raashina Humayun, Girish Dixit, Anna Battaglia, Stefano Rassiga | 2011-11-22 |
| 8058170 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michael Danek, Feng Chen +2 more | 2011-11-15 |
| 8053365 | Methods for forming all tungsten contacts and lines | Raashina Humayun, Karl B. Levy | 2011-11-08 |
| 8043972 | Adsorption based material removal process | Xinye Liu, Joshua Collins | 2011-10-25 |
| 7955972 | Methods for growing low-resistivity tungsten for high aspect ratio and small features | Lana Hiului Chan, Joshua Collins | 2011-06-07 |