Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048805 | Methods for growing low-resistivity tungsten film | Lana Hiului Chan, Panya Wongsenakhum | 2011-11-01 |
| 8043972 | Adsorption based material removal process | Xinye Liu, Kaihan Ashtiani | 2011-10-25 |
| 7955972 | Methods for growing low-resistivity tungsten for high aspect ratio and small features | Lana Hiului Chan, Kaihan Ashtiani | 2011-06-07 |