Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058170 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michael Danek, Kaihan Ashtiani +2 more | 2011-11-15 |
| 8048805 | Methods for growing low-resistivity tungsten film | Panya Wongsenakhum, Joshua Collins | 2011-11-01 |
| 7955972 | Methods for growing low-resistivity tungsten for high aspect ratio and small features | Kaihan Ashtiani, Joshua Collins | 2011-06-07 |