Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062983 | Creation of porosity in low-k films by photo-disassociation of imbedded nanoparticles | Gary W. Ray | 2011-11-22 |
| 8058179 | Atomic layer removal process with higher etch amount | Harald te Nijenhuis, Henner Meinhold, Bart J. van Schravendijk, Lakshmi Nittala | 2011-11-15 |
| 7972976 | VLSI fabrication processes for introducing pores into dielectric materials | Willibrordus Gerardus Maria van den Hoek, Raashina Humayun, Richard S. Hill, Jianing Sun, Gary W. Ray | 2011-07-05 |