Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058179 | Atomic layer removal process with higher etch amount | Nerissa Draeger, Harald te Nijenhuis, Bart J. van Schravendijk, Lakshmi Nittala | 2011-11-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058179 | Atomic layer removal process with higher etch amount | Nerissa Draeger, Harald te Nijenhuis, Bart J. van Schravendijk, Lakshmi Nittala | 2011-11-15 |