Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084339 | Remote plasma processing of interface surfaces | George Andrew Antonelli, Jennifer O'Loughlin, Tony Xavier, Mandyam Sriram, Vishwanathan Rangarajan +2 more | 2011-12-27 |
| 8058179 | Atomic layer removal process with higher etch amount | Nerissa Draeger, Harald te Nijenhuis, Henner Meinhold, Lakshmi Nittala | 2011-11-15 |
| 8030777 | Protection of Cu damascene interconnects by formation of a self-aligned buffer layer | Thomas W. Mountsier, Mahesh K. Sanganeria, Glenn B. Alers, Roey Shaviv | 2011-10-04 |
| 8003549 | Methods of forming moisture barrier for low K film integration with anti-reflective layers | Ming Li, Tom Mountsier, Chiu Chi, Kevin J. Ilcisin, Julian J. Hsieh | 2011-08-23 |
| 7981763 | Atomic layer removal for high aspect ratio gapfill | Harald te Nijenhuis | 2011-07-19 |