Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017527 | Method and apparatus to reduce defects in liquid based PECVD films | Arul N. Dhas, Joseph Bradley Laird | 2011-09-13 |
| 8003549 | Methods of forming moisture barrier for low K film integration with anti-reflective layers | Bart J. van Schravendijk, Tom Mountsier, Chiu Chi, Kevin J. Ilcisin, Julian J. Hsieh | 2011-08-23 |