Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017527 | Method and apparatus to reduce defects in liquid based PECVD films | Arul N. Dhas, Ming Li | 2011-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017527 | Method and apparatus to reduce defects in liquid based PECVD films | Arul N. Dhas, Ming Li | 2011-09-13 |