Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034725 | Method of eliminating small bin defects in high throughput TEOS films | Jon Henri, Xingyuan Tang, Jason Tian, Kevin Gerber | 2011-10-11 |
| 8017527 | Method and apparatus to reduce defects in liquid based PECVD films | Ming Li, Joseph Bradley Laird | 2011-09-13 |