Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034725 | Method of eliminating small bin defects in high throughput TEOS films | Jon Henri, Jason Tian, Kevin Gerber, Arul N. Dhas | 2011-10-11 |
| 7968436 | Low-K SiC copper diffusion barrier films | Yongsik Yu, Karen Billington, Haiying Fu, Michael Carris, William Crew | 2011-06-28 |