Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021486 | Protective self-aligned buffer layers for damascene interconnects | Mandyam Sriram, Roey Shaviv, Kaushik Chattopadhyay, Hui-Jung Wu | 2011-09-20 |
| 7981777 | Methods of depositing stable and hermetic ashable hardmask films | Pramod Subramonium, Zhiyuan Fang, Jon Henri | 2011-07-19 |
| 7968436 | Low-K SiC copper diffusion barrier films | Karen Billington, Xingyuan Tang, Haiying Fu, Michael Carris, William Crew | 2011-06-28 |
| 7915166 | Diffusion barrier and etch stop films | Pramod Subramonium, Zhiyuan Fang, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2011-03-29 |