Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915166 | Diffusion barrier and etch stop films | Yongsik Yu, Pramod Subramonium, Zhiyuan Fang, Jon Henri, Elizabeth Apen | 2011-03-29 |
| 7906174 | PECVD methods for producing ultra low-k dielectric films using UV treatment | Qingguo Wu, Easwar Srinivasan | 2011-03-15 |