Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998881 | Method for making high stress boron-doped carbon films | James S. Sims, Mandyam Sriram, Seshasayee Varadarajan, Akhil Singhal | 2011-08-16 |
| 7923385 | Methods for producing low stress porous and CDO low-K dielectric materials using precursors with organic functional groups | Haiying Fu | 2011-04-12 |
| 7906174 | PECVD methods for producing ultra low-k dielectric films using UV treatment | Easwar Srinivasan, Dan Vitkavage | 2011-03-15 |
| 7906817 | High compressive stress carbon liners for MOS devices | James S. Sims, Mandyam Sriram, Seshasayee Varadarajan, Haiying Fu, Pramod Subramonium +2 more | 2011-03-15 |