Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998881 | Method for making high stress boron-doped carbon films | Qingguo Wu, Mandyam Sriram, Seshasayee Varadarajan, Akhil Singhal | 2011-08-16 |
| 7906817 | High compressive stress carbon liners for MOS devices | Qingguo Wu, Mandyam Sriram, Seshasayee Varadarajan, Haiying Fu, Pramod Subramonium +2 more | 2011-03-15 |