Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084339 | Remote plasma processing of interface surfaces | George Andrew Antonelli, Jennifer O'Loughlin, Tony Xavier, Bart J. van Schravendijk, Vishwanathan Rangarajan +2 more | 2011-12-27 |
| 8021486 | Protective self-aligned buffer layers for damascene interconnects | Yongsik Yu, Roey Shaviv, Kaushik Chattopadhyay, Hui-Jung Wu | 2011-09-20 |
| 7998881 | Method for making high stress boron-doped carbon films | Qingguo Wu, James S. Sims, Seshasayee Varadarajan, Akhil Singhal | 2011-08-16 |
| 7906817 | High compressive stress carbon liners for MOS devices | Qingguo Wu, James S. Sims, Seshasayee Varadarajan, Haiying Fu, Pramod Subramonium +2 more | 2011-03-15 |