Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981777 | Methods of depositing stable and hermetic ashable hardmask films | Yongsik Yu, Zhiyuan Fang, Jon Henri | 2011-07-19 |
| 7981810 | Methods of depositing highly selective transparent ashable hardmask films | Zhiyuan Fang, Jon Henri | 2011-07-19 |
| 7915166 | Diffusion barrier and etch stop films | Yongsik Yu, Zhiyuan Fang, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2011-03-29 |
| 7906817 | High compressive stress carbon liners for MOS devices | Qingguo Wu, James S. Sims, Mandyam Sriram, Seshasayee Varadarajan, Haiying Fu +2 more | 2011-03-15 |