Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043667 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Easwar Srinivasan, David Mordo | 2011-10-25 |
| 7968436 | Low-K SiC copper diffusion barrier films | Yongsik Yu, Karen Billington, Xingyuan Tang, Michael Carris, William Crew | 2011-06-28 |
| 7923385 | Methods for producing low stress porous and CDO low-K dielectric materials using precursors with organic functional groups | Qingguo Wu | 2011-04-12 |
| 7906817 | High compressive stress carbon liners for MOS devices | Qingguo Wu, James S. Sims, Mandyam Sriram, Seshasayee Varadarajan, Pramod Subramonium +2 more | 2011-03-15 |