Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043667 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Haiying Fu, Easwar Srinivasan, David Mordo | 2011-10-25 |
| 7968439 | Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces | Shijian Li, Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Dongwon Choi +1 more | 2011-06-28 |
| 7892985 | Method for porogen removal and mechanical strength enhancement of low-k carbon doped silicon oxide using low thermal budget microwave curing | George D. Papasouliotis, Mike Barnes | 2011-02-22 |
| 7871828 | In-situ dose monitoring using optical emission spectroscopy | Majeed A. Foad | 2011-01-18 |