Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053355 | Methods and systems for low interfacial oxide contact between barrier and copper metallization | Fritz Redeker, John M. Boyd, Yezdi Dordi, Hyungsuk Alexander Yoon | 2011-11-08 |
| 8034409 | Methods, apparatuses, and systems for fabricating three dimensional integrated circuits | Fritz Redeker, Yezdi Dordi | 2011-10-11 |
| 7980255 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2011-07-19 |
| 7977199 | Method for measuring dopant concentration during plasma ion implantation | Majeed A. Foad | 2011-07-12 |
| 7968439 | Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces | Kartik Ramaswamy, Hiroji Hanawa, Seon-Mee Cho, Biagio Gallo, Dongwon Choi +1 more | 2011-06-28 |