Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069813 | Wafer electroless plating system and associated methods | William Thie, Fritz Redeker, Yezdi Dordi, John Parks, Tiruchirapalli Arunagiri +5 more | 2011-12-06 |
| 8053355 | Methods and systems for low interfacial oxide contact between barrier and copper metallization | Fritz Redeker, Yezdi Dordi, Hyungsuk Alexander Yoon, Shijian Li | 2011-11-08 |
| 8048283 | Method and apparatus for plating semiconductor wafers | Yezdi Dordi, Bob Maraschin, Fred C. Redeker, Carl Woods | 2011-11-01 |
| 8026605 | Interconnect structure and method of manufacturing a damascene structure | Yezdi Dordi, Fritz Redeker, William Thie, Tiruchirapalli Arunagiri, Hyungsuk Alexander Yoon | 2011-09-27 |
| 7947157 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | Mike Ravkin, Yezdi Dordi, Fred C. Redeker, John M. de Larios | 2011-05-24 |
| 7909934 | Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency | Andras Kuthi, Michael G. R. Smith, Thomas W. Anderson, William Thie | 2011-03-22 |
| 7884017 | Thermal methods for cleaning post-CMP wafers | Zhonghui Wang, Tiruchirapalli Arunagiri, Fritz Redeker, Yezdi Dordi, Mikhail Korolik +3 more | 2011-02-08 |
| 7875554 | Method for electroless depositing a material on a surface of a wafer | Yezdi Dordi, William Thie, Bob Maraschin, Fred C. Redeker, Joel M. Cook | 2011-01-25 |
| 7862693 | Apparatus for plating semiconductor wafers | Yezdi Dordi, Fred C. Redeker, Robert A. Maraschin, Carl Woods | 2011-01-04 |