Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043441 | Method and apparatus for cleaning a substrate using non-Newtonian fluids | John M. de Larios, Jeffrey Farber, Mikhail Korolik, Fred C. Redeker | 2011-10-25 |
| 7997288 | Single phase proximity head having a controlled meniscus for treating a substrate | Alex Kabansky, John M. de Larios | 2011-08-16 |
| 7946303 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Robert O'Donnell, Eric H. Lenz, Mark Wilcoxson, Alexander A. Yatskar | 2011-05-24 |
| 7947157 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | John M. Boyd, Yezdi Dordi, Fred C. Redeker, John M. de Larios | 2011-05-24 |
| 7939139 | Methods for atomic layer deposition (ALD) using a proximity meniscus | Mikhail Korolik, Mark Wilcoxson | 2011-05-10 |
| 7897213 | Methods for contained chemical surface treatment | Katrina Mikhaylichenko, Fritz Redeker, John M. de Larios, Erik M. Freer, Mikhail Korolik | 2011-03-01 |