Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080760 | Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor | Rajinder Dhindsa, Andy W. DeSepte, Lumin Li | 2011-12-20 |
| 8000082 | Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same | Rajinder Dhindsa, Lumin Li, Felix Kozakevich | 2011-08-16 |
| 7946303 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Robert O'Donnell, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar | 2011-05-24 |
| 7867356 | Apparatus for reducing polymer deposition on a substrate and substrate support | Jose Tong | 2011-01-11 |