Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021512 | Method of preventing premature drying | Seokmin Yun | 2011-09-20 |
| 7946303 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Robert O'Donnell, Eric H. Lenz, Mike Ravkin, Alexander A. Yatskar | 2011-05-24 |
| 7939139 | Methods for atomic layer deposition (ALD) using a proximity meniscus | Mike Ravkin, Mikhail Korolik | 2011-05-10 |