Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043441 | Method and apparatus for cleaning a substrate using non-Newtonian fluids | John M. de Larios, Mike Ravkin, Jeffrey Farber, Fred C. Redeker | 2011-10-25 |
| 8011116 | Substrate proximity drying using in-situ local heating of substrate | Katrina Mikhaylichenko, Kenneth C. Dodge, Michael Ravkin, John M. de Larios, Fritz Redeker | 2011-09-06 |
| 7975708 | Proximity head with angled vacuum conduit system, apparatus and method | Michael Ravkin, John M. de Larios, Fred C. Redeker, Erik M. Freer | 2011-07-12 |
| 7939139 | Methods for atomic layer deposition (ALD) using a proximity meniscus | Mike Ravkin, Mark Wilcoxson | 2011-05-10 |
| 7897213 | Methods for contained chemical surface treatment | Katrina Mikhaylichenko, Mike Ravkin, Fritz Redeker, John M. de Larios, Erik M. Freer | 2011-03-01 |
| 7884017 | Thermal methods for cleaning post-CMP wafers | Zhonghui Wang, Tiruchirapalli Arunagiri, Fritz Redeker, Yezdi Dordi, John M. Boyd +3 more | 2011-02-08 |
| 7862662 | Method and material for cleaning a substrate | Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Fred C. Redeker | 2011-01-04 |