Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043441 | Method and apparatus for cleaning a substrate using non-Newtonian fluids | Mike Ravkin, Jeffrey Farber, Mikhail Korolik, Fred C. Redeker | 2011-10-25 |
| 8011116 | Substrate proximity drying using in-situ local heating of substrate | Katrina Mikhaylichenko, Kenneth C. Dodge, Mikhail Korolik, Michael Ravkin, Fritz Redeker | 2011-09-06 |
| 7997288 | Single phase proximity head having a controlled meniscus for treating a substrate | Mike Ravkin, Alex Kabansky | 2011-08-16 |
| 7975708 | Proximity head with angled vacuum conduit system, apparatus and method | Michael Ravkin, Fred C. Redeker, Mikhail Korolik, Erik M. Freer | 2011-07-12 |
| 7947157 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | Mike Ravkin, John M. Boyd, Yezdi Dordi, Fred C. Redeker | 2011-05-24 |
| 7913703 | Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Ji Zhu, Carl Woods | 2011-03-29 |
| 7897213 | Methods for contained chemical surface treatment | Katrina Mikhaylichenko, Mike Ravkin, Fritz Redeker, Erik M. Freer, Mikhail Korolik | 2011-03-01 |
| 7862662 | Method and material for cleaning a substrate | Erik M. Freer, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker | 2011-01-04 |