Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084406 | Apparatus for particle removal by single-phase and two-phase media | David Mui, Satish SRINIVASAN, Grant Peng, Shih-Chung Kon, Dragan Podlesnik +1 more | 2011-12-27 |
| 7967019 | Method and apparatus for removing contaminants from substrate | Arjun Mendiratta, David Mui | 2011-06-28 |
| 7913703 | Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Carl Woods, John M. de Larios | 2011-03-29 |