Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080760 | Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor | Rajinder Dhindsa, Eric H. Lenz, Andy W. DeSepte | 2011-12-20 |
| 8000082 | Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same | Rajinder Dhindsa, Eric H. Lenz, Felix Kozakevich | 2011-08-16 |
| 7977242 | Double mask self-aligned double patterning technology (SADPT) process | S. M. Reza Sadjadi, Andrew R. Romano | 2011-07-12 |
| 7977390 | Method for plasma etching performance enhancement | Bing Ji, Erik A. Edelberg, Takumi Yanagawa, Zhisong Huang | 2011-07-12 |
| 7874807 | Air compressor with shut-off mechanism | Sean D. Hill | 2011-01-25 |