Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083855 | Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body | Henry Povolny, Jerry K. Antolik | 2011-12-27 |
| 8080760 | Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor | Eric H. Lenz, Andy W. DeSepte, Lumin Li | 2011-12-20 |
| 8069817 | Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses | Andreas Fischer | 2011-12-06 |
| 8043430 | Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber | Jerrel K. Antolik, Scott Stevenot | 2011-10-25 |
| 8012306 | Plasma processing reactor with multiple capacitive and inductive power sources | — | 2011-09-06 |
| 8000082 | Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same | Eric H. Lenz, Lumin Li, Felix Kozakevich | 2011-08-16 |