Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043430 | Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber | Rajinder Dhindsa, Jerrel K. Antolik | 2011-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043430 | Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber | Rajinder Dhindsa, Jerrel K. Antolik | 2011-10-25 |