Issued Patents 2011
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069817 | Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses | Rajinder Dhindsa | 2011-12-06 |
| 8058476 | HCI polymorphs of 3-((2-(dimethylamino)methyl(cyclohex-1-yl)) phenol | Michael Gruss, Markus Kegel, Wolfgang Hell, Markus Von Raumer, Joerg Berghausen +1 more | 2011-11-15 |
| D643510 | Rotary atomizer | Hans-Jürgen Nolte, Peter Marquardt, Jürgen Berkowitsch, Joachim Schneider | 2011-08-16 |
| 7994364 | Crystalline forms of (−)-(1R,2R)-3-(3-dimethylamino-1-ethyl-2-methylpropyl)-phenol hydrochloride | Helmut Buschmann, Michael Gruss, Dagmar Lischke | 2011-08-09 |
| 7976998 | Apparatus for the deionization of cooling media for fuel cells | Claudius Kormann | 2011-07-12 |
| 7976673 | RF pulsing of a narrow gap capacitively coupled reactor | Peter Loewenhardt, Mukund Srinivasan | 2011-07-12 |
| 7977123 | Arrangements and methods for improving bevel etch repeatability among substrates | Neungho Shin, Fransisco Camargo | 2011-07-12 |
| 7971805 | Atomizer | Hans-Jürgen Nolte, Frank Herre, Peter Marquardt | 2011-07-05 |
| D636843 | Rotary atomizer | Hans-Jürgen Nolte, Peter Marquardt, Jürgen Berkowitsch, Joachim Schneider | 2011-04-26 |
| D636842 | Rotary atomizer | Hans-Jürgen Nolte, Peter Marquardt, Jürgen Berkowitsch, Joachim Schneider | 2011-04-26 |
| 7879184 | Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts | Eric A. Hudson | 2011-02-01 |
| 7861667 | Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode | William S. Kennedy, Peter Loewenhardt, David Trussell | 2011-01-04 |