Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080107 | Showerhead electrode assembly for plasma processing apparatuses | David Jacob | 2011-12-20 |
| 7943007 | Configurable bevel etcher | Andrew D. Bailey, III, Alan M. Schoepp, Gregory Sexton, Yunsang Kim | 2011-05-17 |
| 7861667 | Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode | Andreas Fischer, Peter Loewenhardt, David Trussell | 2011-01-04 |