Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976673 | RF pulsing of a narrow gap capacitively coupled reactor | Mukund Srinivasan, Andreas Fischer | 2011-07-12 |
| 7861667 | Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode | Andreas Fischer, William S. Kennedy, David Trussell | 2011-01-04 |