Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943007 | Configurable bevel etcher | Andrew D. Bailey, III, Alan M. Schoepp, Yunsang Kim, William S. Kennedy | 2011-05-17 |
| 7938931 | Edge electrodes with variable power | Andrew D. Bailey, III, Andras Kuthi | 2011-05-10 |
| 7922866 | Apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer | Andrew D. Bailey, III, Alan M. Schoepp, John D. Boniface | 2011-04-12 |