Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083890 | Gas modulation to control edge exclusion in a bevel edge etching plasma chamber | Tong Fang, Andrew D. Bailey, III, Olivier Rigoutat, George Stojakovic | 2011-12-27 |
| 7943007 | Configurable bevel etcher | Andrew D. Bailey, III, Alan M. Schoepp, Gregory Sexton, William S. Kennedy | 2011-05-17 |
| 7909960 | Apparatus and methods to remove films on bevel edge and backside of wafer | Andrew D. Bailey, III | 2011-03-22 |