Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083890 | Gas modulation to control edge exclusion in a bevel edge etching plasma chamber | Tong Fang, Yunsang Kim, Andrew D. Bailey, III, George Stojakovic | 2011-12-27 |
OR
Olivier Rigoutat
Overall (2011): #201,429 of 364,097Top 60%
1
Patents 2011