Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2011-11-15 |
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 8057601 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 7980255 | Single wafer dryer and drying methods | Younes Achkire, Boris Govzman, Boris Fishkin, Michael Sugarman, Rashid Mavleiv +4 more | 2011-07-19 |
| 7933009 | Method and apparatus for verifying proper substrate positioning | Oleg V. Serebryanov, Aaron Muir Hunter, Joseph M. Ranish | 2011-04-26 |
| 7923280 | Millisecond annealing (DSA) edge protection | Blake Koelmel, Robert C. McIntosh, David D L Larmagnac, Abhilash J. Mayur, Joseph Yudovsky | 2011-04-12 |
| 7923660 | Pulsed laser anneal system architecture | Timothy N. Thomas, Sundar Ramamurthy | 2011-04-12 |