Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca, Mehran Behdjat +3 more | 2011-11-15 |
| 7951728 | Method of improving oxide growth rate of selective oxidation processes | Yoshitaka Yokota, Balasubramanian Ramachandran, Martin John Ripley | 2011-05-31 |
| 7947561 | Methods for oxidation of a semiconductor device | Rajesh Mani, Timothy Weidman, Yoshitaka Yokota | 2011-05-24 |