Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951728 | Method of improving oxide growth rate of selective oxidation processes | Yoshitaka Yokota, Norman L. Tam, Balasubramanian Ramachandran | 2011-05-31 |
| 7922863 | Apparatus for integrated gas and radiation delivery | Sean M. Seutter | 2011-04-12 |